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| Título: | Third-mode 48 MHz free-free beam resonator used as a RF balun |
Autor: | López, Joan Lluis; Giner, Joan Josep; Murillo Rodríguez, Gonzalo CSIC ORCID ; Torres, Francisco; Marigó, Eloi; Uranga, Arantxa; Abadal, Gabriel; Barniol, Nuria | Palabras clave: | CMOS-MEMS | Micromechanical baluns | Phase inversion | RF-MEMS | Fecha de publicación: | 1-may-2010 | Editor: | Elsevier | Citación: | Microelectronic Engineering | Resumen: | In this paper, we present a new functional MEMS device monolithically integrated in a CMOS technology which is capable to mechanically perform the function of a balun, i.e. convert electrical signals that are unbalanced (single ended) to balanced ones. The RF-MEMS device consists on a 3rd order lateral mode free-free beam with a 48 MHz resonance frequency. The resonator is electrically actuated and capacitively detected allowing a fully integrated system. Two electrode configurations allow the signal phase shift between the two outputs of the RF-CMOS-MEMS device. © 2009 Elsevier B.V. All rights reserved. | Versión del editor: | https://doi.org/10.1016/j.mee.2009.11.079 | URI: | http://hdl.handle.net/10261/346480 | DOI: | 10.1016/j.mee.2009.11.079 | ISSN: | 01679317 |
| Aparece en las colecciones: | (IMB-CNM) Artículos |
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| accesoRestringido.pdf | Acceso restringido | 59,24 kB | Adobe PDF |  Visualizar/Abrir |
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