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Título: | Growth dynamics of nanocolumnar thin films deposited by magnetron sputtering at oblique angles |
Autor: | Álvarez, Rafael CSIC ORCID; García-Valenzuela, Aurelio; Regodon, G.; Ferrer, F. J. CSIC ORCID; Rico, Víctor J. CSIC ORCID; García-Martín, José Miguel CSIC ORCID ; González-Elipe, Agustín R. CSIC ORCID; Palmero, Alberto CSIC ORCID | Palabras clave: | Magnetron sputtering Oblique angle deposition Nanocolumns Hyperthermal processes |
Fecha de publicación: | 2024 | Editor: | Institute of Physics Publishing | Citación: | Nanotechnology 35(9): 095705 (2024) | Resumen: | The morphology of numerous nanocolumnar thin films deposited by the magnetron sputtering technique at oblique geometries and at relatively low temperatures has been analyzed for materials as different as Au, Pt, Ti, Cr, TiO, Al, HfN, Mo, V, WO and W. Despite similar deposition conditions, two characteristic nanostructures have been identified depending on the material: a first one defined by highly tilted and symmetric nanocolumnar structures with a relatively high film density, and a second one characterized by rather vertical and asymmetric nanocolumns, with a much lower film density. With the help of a model, the two characteristic nanostructures have been linked to different growth dynamics and, specifically, to different surface relaxation mechanisms upon the incorporation of gaseous species with kinetic energies above the surface binding energy. Moreover, in the case of Ti, a smooth structural transition between the two types of growths has been found when varying the value of the power used to maintain the plasma discharge. Based on these results, the existence of different surface relaxation mechanisms is proposed, which quantitatively explains numerous experimental results under the same conceptual framework. | Versión del editor: | http://dx.doi.org/10.1088/1361-6528/ad113d | URI: | http://hdl.handle.net/10261/342481 | DOI: | 10.1088/1361-6528/ad113d | ISSN: | 0957-4484 | E-ISSN: | 1361-6528 |
Aparece en las colecciones: | (IMN-CNM) Artículos (ICMS) Artículos (CNA) Artículos |
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