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dc.contributor.author | Larruquert, Juan Ignacio | - |
dc.contributor.author | Rodríguez de Marcos, Luís | - |
dc.contributor.author | Méndez, José Antonio | - |
dc.contributor.author | Martín, P. J. | - |
dc.contributor.author | Bendavid, A. | - |
dc.date.accessioned | 2014-02-12T10:25:33Z | - |
dc.date.available | 2014-02-12T10:25:33Z | - |
dc.date.issued | 2013 | - |
dc.identifier | doi: 10.1364/OE.21.027537 | - |
dc.identifier | issn: 1094-4087 | - |
dc.identifier.citation | Optics Express 21: 27537-27549 (2013) | - |
dc.identifier.uri | http://hdl.handle.net/10261/91646 | - |
dc.description.abstract | The extreme ultraviolet (EUV) reflectance of amorphous tetrahedrally coordinated carbon films (ta-C) prepared by filtered cathodic vacuum arc was measured in the 30-188-nm range at near normal incidence. The measured reflectance of films grown with average ion energies in the ~70-140-eV range was significantly larger than the reflectance of a C film grown with average ion energy of ~20 eV and of C films deposited by sputtering or evaporation. The difference is attributed to a large proportion of sp3 atom bonding in the ta-C film. This high reflectance is obtained for films deposited onto room-temperature substrates. The reflectance of ta-C films is higher than the standard singlelayer coating materials in the EUV spectral range below 130 nm. A selfconsistent set of optical constants of ta-C films was obtained with the Kramers-Krönig analysis using ellipsometry measurements in the 190-950 nm range and the EUV reflectance measurements. These optical constants allowed calculating the EUV reflectance of ta-C films at grazing incidence for applications such as free electron laser mirrors. © 2013 OSA | - |
dc.description.sponsorship | This work was partially supported by the National Programme for Space Research, Subdirección General de Proyectos de Investigación, Ministerio Economía y Competitividad, Project No. AYA2010-22032. | - |
dc.language.iso | eng | - |
dc.publisher | Optical Society of America | - |
dc.rights | openAccess | - |
dc.subject | Extreme | - |
dc.subject | Ultraviolet | - |
dc.subject | Optical constants | - |
dc.subject | Thin films | - |
dc.subject | Optical properties | - |
dc.subject | Mirrors | - |
dc.subject | Space optics | - |
dc.subject | Free-electron lasers, FELs | - |
dc.title | High reflectance ta-C coatings in the extreme ultraviolet | - |
dc.type | artículo | - |
dc.identifier.doi | 10.1364/OE.21.027537 | - |
dc.date.updated | 2014-02-12T10:25:33Z | - |
dc.description.version | Peer Reviewed | - |
dc.type.coar | http://purl.org/coar/resource_type/c_6501 | es_ES |
item.openairetype | artículo | - |
item.languageiso639-1 | en | - |
item.cerifentitytype | Publications | - |
item.grantfulltext | open | - |
item.fulltext | With Fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
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Larruquert.pdf | 2,18 MB | Adobe PDF | Visualizar/Abrir |
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