Por favor, use este identificador para citar o enlazar a este item:
http://hdl.handle.net/10261/74450
COMPARTIR / EXPORTAR:
SHARE CORE BASE | |
Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL | DATACITE | |
Título: | Surface acoustic wave velocity of gold films deposited on silicon substrates at different temperatures |
Autor: | Salas, Eduardo CSIC ORCID; Jiménez Riobóo, R. J. CSIC ORCID; Prieto, Carlos CSIC ORCID ; Every, A. G. | Fecha de publicación: | 2011 | Editor: | American Institute of Physics | Citación: | Journal of Applied Physics 110(2): 023503 (2011) | Resumen: | Au thin films have been deposited by DC magnetron sputtering on Si (001) substrates at different substrate temperatures, ranging from 200 K to 450 K. With increasing temperature, the expected crystallinity and morphology of the Au thin film are clearly improved, as shown by x ray diffraction, atomic force microscopy and scanning electron microscopy experiments. Parallel to this, the surface acoustic wave propagation velocity shows a clear enhancement toward the ideal values obtained from numerical simulations of a Au thin film on Si (001) substrate. Moreover, a very thin and slightly rough interlayer between the Si (001) substrate and the Au thin film is developed for temperatures above 350 K. The composition and nature of this interlayer is not known. This interlayer may be responsible for the steep change in the structural and elastic properties of the Au thin films at the higher temperatures and possibly also for an improvement of the adhesion properties of the Au on the Si (001) substrate. © 2011 American Institute of Physics. | Versión del editor: | http://dx.doi.org/10.1063/1.3606412 | URI: | http://hdl.handle.net/10261/74450 | DOI: | 10.1063/1.3606412 | Identificadores: | doi: 10.1063/1.3606412 issn: 0021-8979 |
Aparece en las colecciones: | (ICMM) Artículos |
Ficheros en este ítem:
Fichero | Descripción | Tamaño | Formato | |
---|---|---|---|---|
Surface acoustic.pdf | 2,44 MB | Unknown | Visualizar/Abrir |
CORE Recommender
SCOPUSTM
Citations
12
checked on 21-abr-2024
WEB OF SCIENCETM
Citations
13
checked on 27-feb-2024
Page view(s)
282
checked on 27-abr-2024
Download(s)
464
checked on 27-abr-2024
Google ScholarTM
Check
Altmetric
Altmetric
NOTA: Los ítems de Digital.CSIC están protegidos por copyright, con todos los derechos reservados, a menos que se indique lo contrario.