Time resolved reflectivity and transmission measurements during laser induced blow-off of thin metal films

Abstract

Time resolved reflectivity and transmission measurements with nanosecond time resolution are used to follow the evolution of ablation and material transport during Ar+ and ArF excimer laser induced blow-off of W and Cr films deposited onto glass substrates. The analysis of the optical transients combined with heat flow calculations provides evidence that solid phase material removal is the dominant mechanism for the ablation of W films, while Cr is ablated in the form of vapor and small molten droplets. © 1993.