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http://hdl.handle.net/10261/205552
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dc.contributor.author | El Beainou, R. | - |
dc.contributor.author | García-Valenzuela, Aurelio | - |
dc.contributor.author | Raschetti, M. | - |
dc.contributor.author | Cote, J. M. | - |
dc.contributor.author | Álvarez, Rafael | - |
dc.contributor.author | Palmero, Alberto | - |
dc.contributor.author | Potin, V. | - |
dc.contributor.author | Martin, N. | - |
dc.date.accessioned | 2020-03-27T12:57:56Z | - |
dc.date.available | 2020-03-27T12:57:56Z | - |
dc.date.issued | 2020 | - |
dc.identifier | doi: 10.1016/j.matlet.2020.127381 | - |
dc.identifier | issn: 1873-4979 | - |
dc.identifier.citation | Materials Letters 264 (2020) | - |
dc.identifier.uri | http://hdl.handle.net/10261/205552 | - |
dc.description.abstract | We report on the morphological disparity of the columnar growth in W thin films sputter-deposited by oblique angle deposition. Oriented tungsten thin films (400 ± 50 nm thick) are prepared using a tilt angle α of 80° and a sputtering pressure of 0.25 Pa. Inclined columns (β = 38 ± 2°) are produced and the microstructure is observed by scanning electron microscopy. A 4-view imaging is performed in order to show inhomogeneous growing evolutions in the columns. Morphological features vs. viewing direction are also investigated from a growth simulation of these tilted W columns. Experimental and theoretical approaches are successfully compared and allow understanding how the direction of the W particle flux leads to dense or fibrous morphologies, as the column apexes are in front of the flux or in the shadowing zone. | - |
dc.language | eng | - |
dc.publisher | Elsevier | - |
dc.relation.isversionof | Postprint | - |
dc.rights | openAccess | en_EN |
dc.subject | Oblique angle deposition | - |
dc.subject | W thin films | - |
dc.subject | Tilted columns | - |
dc.subject | Dense | - |
dc.subject | Fibrous morphology. | - |
dc.title | A 4-view imaging to reveal microstructural differences in obliquely sputter-deposited tungsten films | - |
dc.type | artículo | - |
dc.identifier.doi | 10.1016/j.matlet.2020.127381 | - |
dc.relation.publisherversion | http://dx.doi.org/10.1016/j.matlet.2020.127381 | - |
dc.embargo.terms | 2022-01-21 | - |
dc.date.updated | 2020-03-27T12:57:56Z | - |
dc.relation.csic | Sí | - |
dc.type.coar | http://purl.org/coar/resource_type/c_6501 | es_ES |
item.cerifentitytype | Publications | - |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
item.grantfulltext | open | - |
item.openairetype | artículo | - |
item.fulltext | With Fulltext | - |
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Datos adjuntos sin título 00579.pdf | 2,71 MB | Adobe PDF | Visualizar/Abrir |
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