2024-03-28T21:53:09Zhttp://digital.csic.es/dspace-oai/requestoai:digital.csic.es:10261/2055522022-06-28T10:01:14Zcom_10261_98com_10261_3col_10261_351
A 4-view imaging to reveal microstructural differences in obliquely sputter-deposited tungsten films
El Beainou, R.
Garcia-Valenzuela, Aurelio
Raschetti, M.
Cote, J. M.
Álvarez, Rafael
Palmero, Alberto
Potin, V.
Martin, N.
Oblique angle deposition
W thin films
Tilted columns
Dense
Fibrous morphology.
We report on the morphological disparity of the columnar growth in W thin films sputter-deposited by oblique angle deposition. Oriented tungsten thin films (400 ± 50 nm thick) are prepared using a tilt angle α of 80° and a sputtering pressure of 0.25 Pa. Inclined columns (β = 38 ± 2°) are produced and the microstructure is observed by scanning electron microscopy. A 4-view imaging is performed in order to show inhomogeneous growing evolutions in the columns. Morphological features vs. viewing direction are also investigated from a growth simulation of these tilted W columns. Experimental and theoretical approaches are successfully compared and allow understanding how the direction of the W particle flux leads to dense or fibrous morphologies, as the column apexes are in front of the flux or in the shadowing zone.
2020-03-27T12:57:56Z
2020-03-27T12:57:56Z
2020
2020-03-27T12:57:56Z
artículo
http://purl.org/coar/resource_type/c_6501
doi: 10.1016/j.matlet.2020.127381
issn: 1873-4979
Materials Letters 264 (2020)
http://hdl.handle.net/10261/205552
10.1016/j.matlet.2020.127381
Postprint
http://dx.doi.org/10.1016/j.matlet.2020.127381
Sí
open
Elsevier