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http://hdl.handle.net/10261/64156
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Campo DC | Valor | Lengua/Idioma |
---|---|---|
dc.contributor.author | Bausells, Joan | es_ES |
dc.contributor.author | Carrabina, J. | es_ES |
dc.contributor.author | Errachid, Abdelhamid | es_ES |
dc.contributor.author | Merlos Domingo, Ángel | es_ES |
dc.date.accessioned | 2013-01-15T14:20:10Z | - |
dc.date.available | 2013-01-15T14:20:10Z | - |
dc.date.issued | 1999 | - |
dc.identifier.citation | Sensors and Actuators - B - Chemical Biochemical Sensors, vol. 57, pp. 56-62 | es_ES |
dc.identifier.uri | http://hdl.handle.net/10261/64156 | - |
dc.description.abstract | The fabrication of pH-sensitive ISFET devices in an unmodified two-metal commercial CMOS technology (1.0 um from Atmel-ES2) is reported. The ISFET devices have a gate structure compatible with the CMOS process, with an electrically floating electrode consisting on polysilicon plus the two metals. The passivation oxynitride layer acts as the pH-sensitive material in contact with the liquid solution. The devices have shown good operating characteristics, with a 47 mV/pH response. The use of a commercial CMOS process allows the straightforward integration of signal-processing circuitry. An ISFET amplifier circuit has been integrated with the ISFET sensors. | es_ES |
dc.language.iso | eng | es_ES |
dc.publisher | Elsevier | es_ES |
dc.rights | openAccess | es_ES |
dc.subject | ISFET | es_ES |
dc.subject | CMOS sensors | es_ES |
dc.title | Ion-sensitive field-effect transistors fabricated in a commercial CMOS technology | es_ES |
dc.type | artículo | es_ES |
dc.identifier.doi | 10.1016/S0925-4005(99)00135-5 | - |
dc.description.peerreviewed | Peer reviewed | es_ES |
dc.relation.publisherversion | http://dx.doi.org/10.1016/S0925-4005(99)00135-5 | es_ES |
dc.relation.csic | Sí | es_ES |
dc.type.coar | http://purl.org/coar/resource_type/c_6501 | es_ES |
item.cerifentitytype | Publications | - |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
item.grantfulltext | open | - |
item.openairetype | artículo | - |
item.fulltext | With Fulltext | - |
item.languageiso639-1 | en | - |
Aparece en las colecciones: | (IMB-CNM) Artículos |
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SensActB_57_1999_p56-62.pdf | 229,13 kB | Adobe PDF | Visualizar/Abrir |
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