Por favor, use este identificador para citar o enlazar a este item:
http://hdl.handle.net/10261/48778COMPARTIR / EXPORTAR:
 SHARE
 CORE
BASE
|
|
| Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL | DATACITE | |
| Título: | Simulating anisotropic etching of silicon in any etchant: evolutionary algorithm for the calibration of the continuous cellular automaton |
Autor: | Gosálvez, M. A. CSIC ORCID; Ferrando, Néstor CSIC ORCID CVN | Fecha de publicación: | jun-2011 | Editor: | Institute of Physics Publishing | Citación: | Journal of Micromechanics and Microengineering 21(6): 065017 (2011) | Resumen: | An evolutionary algorithm is presented for the automated calibration of the continuous cellular automaton for the simulation of isotropic and anisotropic wet chemical etching of silicon in as many as 31 widely different and technologically relevant etchants, including KOH, KOH+IPA, TMAH and TMAH+Triton, in various concentrations and temperatures. Based on state-of-the-art evolutionary operators, we implement a robust algorithm for the simultaneous optimization of roughly 150 microscopic removal rates based on the minimization of a cost function with four quantitative error measures, including (i) the error between simulated and experimental macroscopic etch rates for numerous surface orientations all over the unit sphere, (ii) the error due to underetching asymmetries and floor corrugation features observed in simulated silicon samples masked using a circular pattern, (iii) the error associated with departures from a step-flow-based hierarchy in the values of the microscopic removal rates, and (iv) the error associated with deviations from a step-flow-based clustering of the microscopic removal rates. For the first time, we present the calibration and successful simulation of two technologically relevant CMOS compatible etchants, namely TMAH and, especially, TMAH+Triton, providing several comparisons between simulated and experimental MEMS structures based on multi-step etching in these etchants. | Descripción: | 15 páginas, 9 figuras, 2 tablas.-- et al. | Versión del editor: | http://dx.doi.org/10.1088/0960-1317/21/6/065017 | URI: | http://hdl.handle.net/10261/48778 | DOI: | 10.1088/0960-1317/21/6/065017 | ISSN: | 0960-1317 | E-ISSN: | 1361-6439 |
| Aparece en las colecciones: | (CFM) Artículos |
Mostrar el registro completo
CORE Recommender
SCOPUSTM
Citations
19
checked on 15-may-2024
WEB OF SCIENCETM
Citations
19
checked on 21-feb-2024
Page view(s)
362
checked on 22-may-2024
Google ScholarTM
Check
Altmetric
Altmetric
NOTA: Los ítems de Digital.CSIC están protegidos por copyright, con todos los derechos reservados, a menos que se indique lo contrario.