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Título: | Detection Limits in Nanomechanical Mass Flow Sensing for Nanofluidics With Nanowire Open Channels |
Autor: | Escobar, Javier Enrique CSIC; Molina Fernández, Juan CSIC ORCID; Gil-Santos, Eduardo CSIC ORCID; Ruz Martínez, José Jaime CSIC ORCID; Malvar, Óscar CSIC ORCID; Kosaka, Priscila M. CSIC ORCID ; Tamayo de Miguel, Francisco Javier CSIC ORCID; San Paulo, Álvaro CSIC ORCID; Calleja, Montserrat CSIC ORCID | Palabras clave: | Semiconductor nanowires NEMS Nanomechanical resonators Nanofluidics Open fluidics Ionic liquids |
Fecha de publicación: | mar-2023 | Editor: | Institute of Electrical and Electronics Engineers | Citación: | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS): 1056-1059 (2023) | Resumen: | Nanomechanical sensing is applied to measure the transport of liquid along the external surface of nanowire open fluidic channels. We integrate nanowire open channels with microcantilever resonators as sensors, enabling larger flow measurements; or use the nanowires simultaneously as open channels and resonators, for quantifying extremely small amounts of liquid. We study the detection limits of both systems and their implications for measuring the transport of ionic liquid from a microdroplet reservoir to Si nanowires when these are partially inserted into the microdroplet in the absence of any electrical signal. We obtain detection limits in the order of tens of femtogram and single attograms for each system, respectively, and a combined sensing range from 1 ag to beyond 10 pg, enabling the detection of transport of liquid volumes down to the zeptoliter scale. | Descripción: | Trabajo presentado en la 36th International Conference on Micro Electro Mechanical Systems (MEMS), celebrada en Munich (Alemania), del 15 al 19 de enero de 2023. © 2023 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. |
Versión del editor: | http://dx.doi.org/10.1109/MEMS49605.2023.10052471 | URI: | http://hdl.handle.net/10261/311417 | DOI: | 10.1109/MEMS49605.2023.10052471 | Identificadores: | doi: 10.1109/MEMS49605.2023.10052471 issn: 1084-6999 |
Aparece en las colecciones: | (IMN-CNM) Artículos |
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DETECTION LIMITS_Escobar.pdf | 568,94 kB | Adobe PDF | Visualizar/Abrir |
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