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Título: | T-shaped microcantilever sensor with reduced deflection offset |
Autor: | Plaza, José Antonio CSIC ORCID ; Zinoviev, Kirill CSIC; Villanueva, Geronimo L.; Álvarez, Mar CSIC ORCID; Tamayo de Miguel, Francisco Javier CSIC ORCID; Domínguez Horna, Carlos CSIC ORCID; Lechuga, Laura M. CSIC ORCID | Fecha de publicación: | 31-ago-2006 | Editor: | American Institute of Physics | Citación: | Applied Physics Letters 89(9): 094109 (2006) | Resumen: | The authors have designed and fabricated arrays of microcantilevers with a geometry that shows reduced initial angular offset and angle deviation between the cantilevers of the array. This feature allows to detect the displacement of the cantilevers using the optical beam deflection technique and a single split photodetector. The structure is analytically and numerically simulated to demonstrate its feasibility. In addition, experimental measurements of the angle offset corroborate the offset and the angle deviation reduction. Finally, they illustrate the potential of these micromechanical structures as sensors by measuring a monolayer of single stranded DNA. | Descripción: | 3 páginas, 2 figuras, 1 tabla. | Versión del editor: | http://dx.doi.org/10.1063/1.2345234 | URI: | http://hdl.handle.net/10261/27968 | DOI: | 10.1063/1.2345234 | ISSN: | 0003-6951 |
Aparece en las colecciones: | (IMN-CNM) Artículos (IMB-CNM) Artículos |
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http___scitation.aip.org10.1063_1.pdf | 148,35 kB | Adobe PDF | Visualizar/Abrir |
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