English   español  
Please use this identifier to cite or link to this item: http://hdl.handle.net/10261/230333
Share/Impact:
Statistics
logo share SHARE logo core CORE   Add this article to your Mendeley library MendeleyBASE

Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL | DATACITE
Exportar a otros formatos:

Title

Yield-aware multi-objective optimization of a MEMS accelerometer system using QMC-based methodologies

AuthorsPak, Murat; Fernández, Francisco V. ; Dundar, Gunhan
Issue Date2020
PublisherELSEVIER SCIENCE LTD
CitationMICROELECTRONICS JOURNAL 103 (2020)
AbstractThis paper proposes a novel yield-aware optimization methodology that can be used for mixed-domain synthesis of robust micro-electro-mechanical systems (MEMS). The robust Pareto front optimization of a MEMS accelerometer system, which includes a capacitive MEMS sensor and an analog read-out circuitry, is realized by co-optimization of the mixed-domain system where the sensor performances are evaluated using highly accurate analytical models and the circuit level simulations are carried out by an electrical simulator. Two different approaches for yield-aware optimization have been implemented in the synthesis loop. The Quasi Monte Carlo (QMC) technique has been used to embed the variation effects into the optimization loop. The results for both two- and three-dimensional yield-aware optimization are quite promising for robust MEMS accelerometer synthesis.
Publisher version (URL)http://dx.doi.org/10.1016/j.mejo.2020.104876
URIhttp://hdl.handle.net/10261/230333
Identifiersdoi: 10.1016/j.mejo.2020.104876
issn: 0026-2692
Appears in Collections:(IMSE-CNM) Artículos
Files in This Item:
File Description SizeFormat 
Yield-aware multi-objective optimization of MEMS - PAK - Revisedv3_FVFF.pdf Embargoed until August 20, 2022946,56 kBAdobe PDFThumbnail
View/Open    Request a copy
Show full item record
Review this work
 


WARNING: Items in Digital.CSIC are protected by copyright, with all rights reserved, unless otherwise indicated.