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Ultra-thin free-standing single crystalline silicon membranes with strain control

AuthorsShchepetov, A.; Alzina, Francesc CSIC ORCID; Schneider, L.; Cuffe, John CSIC ORCID; Sotomayor Torres, C. M. CSIC ORCID; Ahopelto, J.
Issue Date2013
PublisherAmerican Institute of Physics
CitationApplied Physics Letters 102: 192108 (2013)
AbstractWe report on fabrication and characterization of ultra-thin suspended single crystalline flat silicon membranes with thickness down to 6 nm. We have developed a method to control the strain in the membranes by adding a strain compensating frame on the silicon membrane perimeter to avoid buckling after the release. We show that by changing the properties of the frame the strain of the membrane can be tuned in controlled manner. Consequently, both the mechanical properties and the band structure can be engineered, and the resulting membranes provide a unique laboratory to study low-dimensional electronic, photonic, and phononic phenomena. © 2013 AIP Publishing LLC.
Descriptionet al.
Publisher version (URL)http://dx.doi.org/10.1063/1.4807130
Identifiersdoi: 10.1063/1.4807130
issn: 0003-6951
e-issn: 1077-3118
Appears in Collections:(CIN2) Artículos
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