English   español  
Por favor, use este identificador para citar o enlazar a este item: http://hdl.handle.net/10261/98886
logo share SHARE logo core CORE   Add this article to your Mendeley library MendeleyBASE

Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL
Exportar a otros formatos:

Influence of lateral and in-depth metal segregation on the patterning of ohmic contacts for GaN-based devices

AutorRedondo-Cubero, A.; Vázquez, Luis ; Alves, L. C.
Palabras claveContacts
Fecha de publicación2014
EditorInstitute of Physics Publishing
CitaciónJournal of Physics D: Applied Physics 47(18): 185302 (2014)
ResumenThe lateral and in-depth metal segregation of Au/Ni/Al/Ti ohmic contacts for GaN-based high electron mobility transistors were analysed as a function of the Al barrier's thickness (d). The surface of the contacts, characterized by atomic force and scanning electron microscopy, shows a transition from a fractal network of rough and complex island-like structures towards smoother and cauliflower-like fronts with increasing d. Rutherford backscattering spectrometry and energy dispersive x-ray spectroscopy (EDXS) at different energies were used to confirm the in-depth intermixing of the metals relevant for the final contact resistance. EDXS mapping reveals a significant lateral segregation too, where the resulting patterns depend on two competing NiAl x and AuAlx phases, the intermixing being controlled by the available amount of Al. The optimum ohmic resistance is not affected by the patterning process, but is mainly dependent on the partial interdiffusion of the metals. © 2014 IOP Publishing Ltd.
Identificadoresdoi: 10.1088/0022-3727/47/18/185302
e-issn: 1361-6463
issn: 0022-3727
Aparece en las colecciones: (ICMM) Artículos
Ficheros en este ítem:
Fichero Descripción Tamaño Formato  
accesoRestringido.pdf15,38 kBAdobe PDFVista previa
Mostrar el registro completo

Artículos relacionados:

NOTA: Los ítems de Digital.CSIC están protegidos por copyright, con todos los derechos reservados, a menos que se indique lo contrario.