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Micromachined silicon lenses for terahertz applications

AuthorsBueno-López, Juan ; López-Camacho, Elena ; Silva-López, M.; Rico-García, J. M.; Llombart, N.; Alda, J.; Costa Krämer, José Luis
KeywordsSilicon lenses
Beam pattern
Surface characterisation
THz spectroscopy
Microfabricated lenses
Issue DateNov-2013
CitationInfrared Physics and Technology 61: 144-148 (2013)
AbstractSilicon microlenses are a very important tool for coupling terahertz (THz) radiation into antennas and detectors in integrated circuits. They can be used in a large array structures at this frequency range reducing considerably the crosstalk between the pixels. Drops of photoresist have been deposited and their shape transferred into the silicon by means of a Reactive Ion Etching (RIE) process. Large silicon lenses with a few mm diameter (between 1.5 and 4.5 mm) and hundreds of μm height (between 50 and 350 μm) have been fabricated. The surface of such lenses has been characterized using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM), resulting in a surface roughness of about ∼3 μm, good enough for any THz application. The beam profile at the focal plane of such lenses has been measured at a wavelength of 10.6 μm using a tomographic knife-edge technique and a CO2 laser. © 2013 Published by Elsevier B.V.
Publisher version (URL)http://dx.doi.org/10.1016/j.infrared.2013.08.002
Identifiersissn: 1350-4495
e-issn: 1879-0275
Appears in Collections:(IMN-CNM) Artículos
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