English   español  
Por favor, use este identificador para citar o enlazar a este item: http://hdl.handle.net/10261/87649
logo share SHARE logo core CORE   Add this article to your Mendeley library MendeleyBASE

Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL
Exportar a otros formatos:

Low temperature electron cyclotron resonance plasma technique for low loss integrated optics

AutorPernas, P. L.; Ruíz, E.; Hernández, M. J.; Garrido, J.; García, B. J.; Castaño, J. L.; Requejo, J. M.; Solís Céspedes, Javier ; Serna, Rosalía ; Afonso, Carmen N.
Fecha de publicación2000
CitaciónMicroelectronic Engineering 53: 407-410 (2000)
ResumenElectron Cyclotron Resonance (ECR) plasma deposition process implies low temperatures at high deposition rates producing uniform and mechanically stable thin films. For these reasons ECR became an attractive tool for integrated optics technology. In this work we have combined ECR with other techniques as Reactive Ion Etching (RIE) and Pulsed Laser Deposition (PLD), in order to develop a new fabrication method of channel waveguides. We report here results on alumina-based strip-loaded waveguides. Amorphous Al2O3 core of 0.7 μm were deposited over Si/SiO2 substrate by PLD technique and overcladded with 0.5 μm SiO2-ECR film. Standard UV-photolitographic techniques and RIE were used to define a set of strips on the SiO2. These strips give the additional confinement of the light in the Al2O3 core. The optical losses at 633 nm were measured using an imaging technique. The relative scattered light power as function of the propagation along the channels shows a maximum optical loss of 4.5 dB/cm. © 2000 Elsevier Science B.V. All rights reserved.
Identificadoresdoi: 10.1016/S0167-9317(00)00344-0
issn: 0167-9317
Aparece en las colecciones: (CFMAC-IO) Artículos
Ficheros en este ítem:
Fichero Descripción Tamaño Formato  
accesoRestringido.pdf15,38 kBAdobe PDFVista previa
Mostrar el registro completo

Artículos relacionados:

NOTA: Los ítems de Digital.CSIC están protegidos por copyright, con todos los derechos reservados, a menos que se indique lo contrario.