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Novel methods to pattern polymers for microfluidics

AuthorsMartín, C. ; Llobera, Andreu; Leïchlé, T.; Villanueva, G.; Voigt, A.; Fakhfouri, V.; Kim, J.Y.; Berthet, N.; Bausells, Joan ; Gruetzner, G.; Nicu, L.; Bruegger, Juergen; Perez Murano, Francesc X.
KeywordsLiquid spotter
Hydrophobic barriers
Issue Date10-Jan-2008
CitationMicroelectronic Engineering 85 (2008) 972-975
AbstractWe present two novel methods for the preparation of arbitrary micro-scale patterns of polymers on surfaces with pre-defined topography. While photosensitive polymers are used commonly together with optical lithography, the methods presented can be used for nonphotostructurable polymers and where spin-coating cannot be performed. As demonstrator of the viability of the proposed fabrication process, they have been applied for the definition of hydrophobic barriers on a microfluidics network, which is dedicated to selectively dispense liquid to a spotting device consisting of 12 silicon microcantilevers.
Publisher version (URL)http://dx.doi.org/10.1016/j.mee.2008.01.052
Appears in Collections:(IMB-CNM) Artículos
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