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Energy distributions of neutrals and charged species in hollow cathode H2 discharges: a study of fast H atoms

AuthorsJiménez-Redondo, Miguel ; Carrasco, Esther ; Víctor J, Herrero; Tanarro, Isabel
Issue Date5-Apr-2013
PublisherInstitute of Physics Publishing
CitationPlasma Sources Science and Technology 22: 025022 (2013)
AbstractA joint study of atomic and molecular emission spectroscopy, ion mass spectrometry and Langmuir probes is presented for a hollow cathode H2 discharge at pressures 0.7–20 Pa, rendering energy distributions of the different groups of particles that span five orders of magnitude. The H Balmer line profiles can be decomposed into three contributions ('narrow peak', 'plateau' and 'far wings') with very different widths. The narrow peak and the plateau are largely attributed to electron impact dissociative excitation and ionization of H2, and display Doppler temperatures of ~0.3 eV and ~6 eV, respectively. The energy-resolved mass spectra of H+ confirm the assignment of the plateau region. The far wings give rise to emissions extending to Doppler shifts of 0.5 nm, which correspond to translational energies of ~300 eV. The dependence of the relative intensities of these components on pressure is studied. With a grounded grid before the observation window, a structure is induced in the blue-shifted wing. Assuming that the structure is solely caused by dissociative excitation of H2 upon collisions with the plasma ions (H+, and ), their relative concentrations can be estimated. These estimations are in very good agreement with the values derived from independent mass spectrometric measurements.
Description9 páginas, 7 figuras, 3 tablas. PACS 52.25.Ya; 34.80.Ht; 52.70.Ds; 32.70.Jz; 52.20.Hv;
Publisher version (URL)http://dx.doi.org/10.1088/0963-0252/22/2/025022
Appears in Collections:(CFMAC-IEM) Artículos
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