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Influence of the yttria content on the mechanical properties of Y2O3-ZrO2 thin films prepared by EB-PVD

AuthorsOchando, Isabel M.; Cáceres, D.; García López, J. ; Escobar Galindo, R.; Jiménez Riobóo, R. J. ; Prieto, C.
Issue Date2007
CitationVacuum 81(11-12): 1457-1461 (2007)
AbstractA mechanical characterization study of the whole range (ZrO2)1-x-(Y2O3)x system is presented for thin film samples. Films have been prepared by Electron Beam Physical Vapour Deposition (EB-PVD) on Si(1 0 0) substrates. The mechanical characterization, obtained from nanoindentation and Brillouin Light scattering (BLS) techniques, shows a monotonous behaviour between the two pure compounds of the series except for the film with 0.08 Y2O3 molar content of yttria-stabilized zirconia (YSZ) solid solution that presents an anomalous hard value. Additionally, BLS is presented as an alternative technique to the study of the mechanical properties of this system. © 2007.
Identifiersdoi: 10.1016/j.vacuum.2007.04.028
issn: 0042-207X
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(CNA) Artículos
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