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Early works on the nuclear microprobe for microelectronics irradiation tests at the CEICI (Sevilla, Spain)

AuthorsPalomo, Francisco Rogelio; Morilla, Yolanda ; Mogollón, J. M.; García López, J. ; Labrador, J. A. ; Aguirre, M. A.
Issue Date2011
CitationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 269(20): 2210-2216 (2011)
AbstractParticle radiation effects are a fundamental problem in the use of numerous electronic devices for space applications, which is aggravated with the technology shrinking towards smaller and smaller scales. The suitability of low-energy accelerators for irradiation testing is being considered nowadays. Moreover, the possibility to use a nuclear microprobe, with a lateral resolution of a few microns, allows us to evaluate the behavior under ion irradiation of specific elements in an electronic device. The CEICI is the new CEnter for Integrated Circuits Irradiation tests, created into the facilities at the Centro Nacional de Aceleradores (CNA) in Sevilla-Spain. We have verified that our 3 MV Tandem accelerator, typically used for ion beam characterization of materials, is also a valuable tool to perform irradiation experiments in the low LET (Linear Energy Transfer) region.
Identifiersdoi: 10.1016/j.nimb.2011.02.019
issn: 0168-583X
Appears in Collections:(CNA) Artículos
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