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| Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL | DATACITE | |
| Campo DC | Valor | Lengua/Idioma |
|---|---|---|
| dc.contributor.author | Jiménez, Carmen | - |
| dc.contributor.author | Ferrer, F. J. | - |
| dc.date.accessioned | 2013-04-19T12:45:33Z | - |
| dc.date.available | 2013-04-19T12:45:33Z | - |
| dc.date.issued | 2007 | - |
| dc.identifier | doi: 10.1016/j.surfcoat.2007.04.025 | - |
| dc.identifier | issn: 0257-8972 | - |
| dc.identifier.citation | Surface and Coatings Technology 201(22-23): 8971-8975 (2007) | - |
| dc.identifier.uri | http://hdl.handle.net/10261/74744 | - |
| dc.description.abstract | TiO2 thin films have been deposited at low temperature using a new atmospheric pressure deposition process, which combines remote Atmospheric Pressure (AP) Plasma with Pulsed Injection Metallorganic Chemical Vapour Deposition (PIMOCVD). The effects of post-discharge plasma and deposition parameters have been studied with respect to the deposition kinetics, morphology, and microstructure of TiO2 films. It is shown that well-crystallised TiO2 anatase films can be obtained at a temperature of only 275 °C. © 2007 Elsevier B.V. All rights reserved. | - |
| dc.description.sponsorship | This work has been financially support by the French project “Diademe”, funded by the MINEFI. | - |
| dc.language.iso | eng | - |
| dc.publisher | Elsevier | - |
| dc.rights | closedAccess | - |
| dc.title | Deposition of TiO2 thin films by atmospheric plasma post-discharge assisted injection MOCVD | - |
| dc.type | artículo | - |
| dc.identifier.doi | 10.1016/j.surfcoat.2007.04.025 | - |
| dc.date.updated | 2013-04-19T12:45:33Z | - |
| dc.description.version | Peer Reviewed | - |
| dc.type.coar | http://purl.org/coar/resource_type/c_6501 | es_ES |
| item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
| item.fulltext | No Fulltext | - |
| item.cerifentitytype | Publications | - |
| item.openairetype | artículo | - |
| item.languageiso639-1 | en | - |
| item.grantfulltext | none | - |
| Aparece en las colecciones: | (CNA) Artículos | |
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| Fichero | Descripción | Tamaño | Formato | |
|---|---|---|---|---|
| accesoRestringido.pdf | 15,38 kB | Adobe PDF |  Visualizar/Abrir |
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