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Characterization of a Mo/Au thermometer for ATHENA

AuthorsParra-Borderías, María ; Fernández-Martínez, Iván ; Fàbrega, Lourdes ; Camón, Agustín; Gil García, Óscar ; Costa Krämer, José Luis ; González-Arrabal, Raquel ; Sesé Monclús, Javier ; Bueno-López, Juan ; Briones Fernández-Pola, Fernando
Issue Date2013
PublisherInstitute of Electrical and Electronics Engineers
CitationIEEE Transactions on Applied Superconductivity 23(3): 2300405 (2013)
AbstractThe first dark characterization of a thermometer fabricated with our Mo/Au bilayers to be used as a transition edge sensor is presented. High-quality, stress-free Mo layers, whose thickness is used to tune the critical temperature (TC) down to 100 mK, are deposited by sputtering at room temperature (RT) on Si3N4 bulk and membranes, and protected from degradation with a 15-nm sputtered Au layer. An extra layer of high-quality Au is deposited by ex situ e-beam to ensure low residual resistance. The thermometer is patterned on a membrane using standard photolithographic techniques and wet etching processes, and is contacted through Mo paths, displaying a sharp superconducting transition (α 600). Results show a good coupling between Mo and Au layers and excellent TC reproducibility, allowing to accurately correlate dMo and TC. Since d Au is bigger than \xiM for all analyzed samples, bilayer residual resistance can be modified without affecting TC. Finally, first current to voltage measurements at different temperatures are measured and analyzed, obtaining the corresponding characterization parameters © 2011 IEEE.
DescriptionTrabajo presentado como póster a: The Applied Superconductivity Conference (ASC 2012), celebrada en Portland (US) del 7 al 12 de octubre de 2012.
Publisher version (URL)http://dx.doi.org/10.1109/TASC.2012.2236140
Identifiersissn: 1051-8223
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