Empirical relations among scattering, roughness parameters, and thickness of aluminum films

Por favor, use este identificador para citar o enlazar a este item: http://hdl.handle.net/10261/72230

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Título:	Empirical relations among scattering, roughness parameters, and thickness of aluminum films
Autor:	Larruquert, Juan Ignacio CSIC ORCID; Méndez, José Antonio CSIC; Aznárez, José Antonio CSIC ORCID
Fecha de publicación:	1993
Editor:	Optical Society of America
Citación:	Applied optics 32: 6341-6346 (1993)
Resumen:	Experimental measurements of the angular distribution of scattering and scanning electron microscopy pictures of thin aluminum films were used to relate the total integrated scattering and the statistical parameters of the surface roughness to the film thickness. © 1993 Optical Society of America
URI:	http://hdl.handle.net/10261/72230
DOI:	10.1364/AO.32.006341
Identificadores:	doi: 10.1364/AO.32.006341 issn: 0003-6935
Aparece en las colecciones:	(CFMAC-IO) Artículos

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