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Por favor, use este identificador para citar o enlazar a este item: http://hdl.handle.net/10261/66239
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dc.contributor.authorPisonero, J.-
dc.contributor.authorQuirós, Carlos-
dc.contributor.authorMartín, José Ignacio-
dc.contributor.authorSanz-Medel, A.-
dc.date.accessioned2013-02-07T09:28:12Z-
dc.date.available2013-02-07T09:28:12Z-
dc.date.issued2012-
dc.identifierdoi: 10.1007/s00216-011-5601-3-
dc.identifierissn: 1618-2642-
dc.identifiere-issn: 1618-2650-
dc.identifier.citationAnalytical and Bioanalytical Chemistry 403(8): 2437-2448 (2012)-
dc.identifier.urihttp://hdl.handle.net/10261/66239-
dc.descriptionet al.-
dc.description.abstractDirect solid analysis of ultrathin layers is investigated using pulsed radiofrequency (rf) glow discharge (GD) time-of-flight mass spectrometry (TOFMS). In particular, previous studies have always integrated the detected ion signals in the afterglow region of the rf-GD pulse, which is known to be the most sensitive one. Nevertheless, the analytical capabilities of other pulse time regions have not been evaluated in detail. Therefore, in this work, we investigate the analyte prepeak region, which is the pulse region where the analyte ions peak after the initial sputtering process of each GD pulse, aiming at obtaining improved depth profile analysis with high depth resolution and with minimum polyatomic spectral interferences. To perform these studies, challenging ultrathin Si-Co bilayers deposited on a Si substrate were investigated. The thickness of the external Si layer was 30 nm for all the samples, whilst the internal Co layer thicknesses were 30, 10, 5, 2 and 1 nm, respectively. It should be remarked that the top layer and the substrate have the same matrix composition (Si>99.99%). Therefore, the selected samples are suitable to evaluate the response of the Si ion signal in the presence of an ultrathin Co layer as well as the possible oxygen contaminations or its reactions. Additionally, these samples have been evaluated using time-of-flight secondary ion mass spectrometry, and the results compare well to those obtained by our pulsed rf-GD time-of-flight mass spectrometry results. © Springer-Verlag 2011.-
dc.description.sponsorshipThis work is supported by the projects (MAT2010-20921-C02 and FIS2008-06249) of the Ministry of Science and Innovation of Spain and by the Integrated Action (HI2008-0098) between the University of Oviedo (Spain) and the University of Catania (Italy). J. Pisonero acknowledges financial support from “Ramón y Cajal” Research Program of the Ministry of Science and Innovation of Spain, co-financed by the European Social Fund.-
dc.language.isoeng-
dc.publisherSpringer Nature-
dc.rightsclosedAccess-
dc.titlePulsed rf-GD-TOFMS for depth profile analysis of ultrathin layers using the analyte prepeak region-
dc.typeartículo-
dc.identifier.doi10.1007/s00216-011-5601-3-
dc.date.updated2013-02-07T09:28:12Z-
dc.description.versionPeer Reviewed-
dc.contributor.funderMinisterio de Ciencia e Innovación (España)-
dc.contributor.funderUniversidad de Oviedo-
dc.contributor.funderUniversità degli Studi di Catania-
dc.contributor.funderEuropean Commission-
dc.identifier.funderhttp://dx.doi.org/10.13039/501100004837es_ES
dc.identifier.funderhttp://dx.doi.org/10.13039/501100006382es_ES
dc.identifier.funderhttp://dx.doi.org/10.13039/501100000780es_ES
dc.type.coarhttp://purl.org/coar/resource_type/c_6501es_ES
item.openairetypeartículo-
item.grantfulltextnone-
item.cerifentitytypePublications-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.fulltextNo Fulltext-
item.languageiso639-1en-
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