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Title

Micro- and nano-electromechanical systems for [bio]molecular analysis

AuthorsBausells, Joan
KeywordsMEMS
NEMS
Microcantilever
Biosensor
Issue Date2005
PublisherInstitut d'Estudis Catalans
CitationContributions to Science, vol 3 (1), pp. 67-78
AbstractMicro- and nano-mechanical structures fabricated by silicon micromachining technology can be used as transducing elements in [bio]chemical sensors. Cantilever beams with lengths in the tens of micrometers range and widths and thicknesses in the micrometer or submicrometer range are bent by forces in the range of intermolecular forces. The cantilever deflection can be detected by optical or electrical methods and converted to an electrical output. In this work we discuss the sensitivity and resolution of such electromechanical molecular detectors, and present various examples of existing developments and their application to [bio]molecular analysis.
URIhttp://hdl.handle.net/10261/65698
ISSN1575-6343
Appears in Collections:(IMB-CNM) Artículos
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