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Self-consistent optical constants of sputter-deposited B 4C thin films

AuthorsLarruquert, Juan Ignacio ; Pérez Marín, Antonio P. ; García-Cortés, S.; Rodríguez-de Marcos, L.; Aznárez, José Antonio ; Méndez, José Antonio
Issue Date2012
PublisherOptical Society of America
CitationJournal of the Optical Society of America A: Optics and Image Science, and Vision 29: 117-123 (2012)
AbstractThe optical constants of ion-beam-sputtered B 4C films have been measured by ellipsometry in the 190-950nm range. The set of data has been extended toward both shorter and longer wavelengths with data in the literature, along with interpolations and extrapolations, in order to obtain a self-consistent set of data by means of Kramers-Krönig analysis. All data correspond to films that were deposited by sputtering on nonheated substrates, and hence they are expected to be amorphous. The B 4C bandgap was calculated as a fitting parameter of Tauc equations for indirect transitions using the present optical constants. Good global accuracy of the data was estimated through the use of various sum rules. The consistent data set includes the visible to the extreme UV (EUV); this large spectrum of characterization will enable the design of multilayer coatings that combine a relatively high reflectance in parts of the EUV with a desired performance at a secondary range, such as the visible. © 2011 Optical Society of America.
Identifiersdoi: 10.1364/JOSAA.29.000117
issn: 1084-7529
Appears in Collections:(CFMAC-IO) Artículos
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