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Cathodoluminescence study of ArF excimer laser-induced planarization of large grain diamond films

AuthorsCremades, Ana; Piqueras, J.; Solís Céspedes, Javier
Issue Date1996
PublisherAmerican Institute of Physics
CitationJournal of Applied Physics 79: 8118-8120 (1996)
AbstractPlanarization of large grain diamond films has been induced by 193 nm excimer laser irradiation. Secondary emission images and cathodoluminescence (CL) in the scanning electron microscope have been used to characterize the irradiated area. Irradiation causes changes in the structure of defects involving nitrogen and vacancies. Evolution of the CL signal with the number of pulses indicates that the luminescence intensity tends to stabilize when a smooth film surface is obtained. © 1996 American Institute of Physics.
Identifiersdoi: 10.1063/1.362371
issn: 0021-8979
Appears in Collections:(CFMAC-IO) Artículos
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