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The influence of the substrate on the transformations induced in Si by nanosecond laser irradiation: a time-resolved study

AuthorsSolís Céspedes, Javier ; Afonso, Carmen N. ; Catalina, Fernando
Issue Date1990
CitationApplied Surface Science 46: 383- 387 (1990)
AbstractTime-resolved reflectivity (TRR) and transmission (TRT) measurements are used to characterize the influence of the thermal properties of the substrate on the processes induced in Si by laser irradiation. The irradiations and time-resolved optical measurements are performed in a pump and probe configuration with both beams focused on micron-sized areas. The results show changes in the solidification times and cooling rates of three orders of magnitude when selecting substrates with different thermal conductivities. It is also concluded that the microstructures induced in thin Si films by short laser pulses are different depending on the nature of the substrate and are consistent with the measured solidification parameters. © 1990.
Identifiersdoi: 10.1016/0169-4332(90)90175-Y
issn: 0169-4332
Appears in Collections:(CFMAC-IO) Artículos
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