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Three-dimensional fabrication and characterisation of core-shell nano-columns using electron beam patterning of Ge-doped SiO2

AuthorsGontard, Lionel C. ; Jinschek, Joerg R.; Ou, Haiyan; Verbeeck, Jo; Dunin-Borkowski, Rafal E.
Keywordstransmission electron microscopy
electron irradiation
Ge-doped SiO2
Issue Date28-Jun-2012
PublisherAmerican Institute of Physics
CitationApplied Physics Letters 100 (26): (2012)
AbstractA focused electron beam in a scanning transmission electron microscope (STEM) is used to create arrays of core-shell structures in a specimen of amorphous SiO2 doped with Ge. The same electron microscope is then used to measure the changes that occurred in the specimen in three dimensions using electron tomography. The results show that transformations in insulators that have been subjected to intense irradiation using charged particles can be studied directly in three dimensions. The fabricated structures include core-shell nano-columns, sputtered regions, voids, and clusters
Description5 páginas
Publisher version (URL)http://dx.doi.org/10.1063/1.4731765
Appears in Collections:(ICMS) Artículos
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