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dc.contributor.authorMartín-Fernández, I.-
dc.contributor.authorSansa Perna, Marc-
dc.contributor.authorEsplandiú, María J.-
dc.contributor.authorLora-Tamayo D’Ocón, Emilio-
dc.contributor.authorPerez Murano, Francesc X.-
dc.contributor.authorGodignon, Philippe-
dc.date.accessioned2012-04-24T09:55:11Z-
dc.date.available2012-04-24T09:55:11Z-
dc.date.issued2010-
dc.identifier.citationMicroelectronic Engineering 87(5-8): 1554-1556 (2010)es_ES
dc.identifier.issn0167-9317-
dc.identifier.urihttp://hdl.handle.net/10261/48803-
dc.description3 páginas, 4 figuras.-- Trabajo presentado a: "The 35th International Conference on Micro-and Nano-Engineering (MNE)".es_ES
dc.description.abstractA technology to address massive and batch fabrication of carbon nanotube field effect transistors (CNT-FET) based systems at wafer level is presented. In order to demonstrate the feasibility of the technology, we have designed, fabricated, tested and evaluated a CNT-FET based monitor chip. The monitor chip is composed of 16 different in design CNT-FET structures. In total, each monitor chip contains 5760 devices. Each wafer is composed of 24 monitor chips. Evaluation of the data obtained through automatic test procedures gives evidence of the fabrication of more than 10,000 functional CNT-FET on a 4 inch wafer. A yield of functional CNT-FET of 27% has been achieved for optimal designs.es_ES
dc.description.sponsorshipThis work has partially been founded by CRENATUN and SENSONAT projects. I.M-F acknowledges a grant through the I3P program.es_ES
dc.language.isoenges_ES
dc.publisherElsevieres_ES
dc.rightsclosedAccesses_ES
dc.subjectNanomanufacturinges_ES
dc.subjectCarbon nanotubeses_ES
dc.subjectSingle-walledes_ES
dc.subjectTransistores_ES
dc.subjectCNT-FETes_ES
dc.titleMassive manufacture and characterization of single-walled carbon nanotube field effect transistorses_ES
dc.typeartículoes_ES
dc.identifier.doi10.1016/j.mee.2009.11.026-
dc.description.peerreviewedPeer reviewedes_ES
dc.relation.publisherversionhttp://dx.doi.org/10.1016/j.mee.2009.11.026es_ES
dc.contributor.funderEuropean Commission-
dc.contributor.funderConsejo Superior de Investigaciones Científicas (España)-
dc.contributor.funderEuropean Commission-
dc.identifier.funderhttp://dx.doi.org/10.13039/501100000780es_ES
dc.identifier.funderhttp://dx.doi.org/10.13039/501100003339es_ES
dc.identifier.funderhttp://dx.doi.org/10.13039/501100000780es_ES
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