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Title

Characterization and modeling of piezoelectric integrated micro speakers for audio acoustic actuation

AuthorsMendoza-López, J. ; Sánchez-Solano, Santiago ; Huertas-Díaz, J. L.
KeywordsPizeoelectric
Microspeaker
MEMS
pMUT
Parametric Array
Audio
Issue Date2012
PublisherHindawi Publishing Corporation
CitationISRN Mechanical Engineering: 635268 (2012)
AbstractA study of circular piezoelectric micro speakers is presented for applications in the audio frequency range, including values for impedance, admittance, noise figures, transducer gain, and acoustic frequency responses. The micro speakers were modelled based on piezoelectric micro ultrasonic transducer (pMUT) design techniques and principles. In order to reach the audio frequency range, transducer radii were increased to the order of one centimetre, whilst piezoelectric layer thicknesses ranged the order of several μm. The micro actuators presented might be used for a variety of electroacoustic applications including noise control, hearing aids, earphones, sonar, and medical diagnostic ultrasound. This work main contribution is the characterization of the design space and transducer performance as a function of transducer radius, piezoelectric layer thickness, and frequency range, looking towards an optimized fabrication process.
DescriptionPresented at ICECS WASET 2011, Bali (Indonesia) y publicado como paper en: "World Academy of Science, Engineering and Technology (58): 145-151 (2011)".-- This is an open access article distributed under the Creative Commons Attribution License.
Publisher version (URL)http://dx.doi.org/10.5402/2012/635268
URIhttp://hdl.handle.net/10261/46210
DOI10.5402/2012/635268
ISSN2070-3724
Appears in Collections:(IMSE-CNM) Artículos
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