Por favor, use este identificador para citar o enlazar a este item:
http://hdl.handle.net/10261/42206
COMPARTIR / EXPORTAR:
SHARE CORE BASE | |
Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL | DATACITE | |
Título: | Laser beam deflection-based perimeter scanning of integrated circuits for local overheating location |
Autor: | Perpiñà, X.; Jordà, Xavier; Altet, J.; Vellvehi Hernández, Miquel; Mestres, Narcís CSIC ORCID | Fecha de publicación: | ene-2009 | Editor: | Institute of Physics Publishing | Citación: | Journal of Physics D: Applied Physics 42(1): 012002 (2009) | Resumen: | In integrated circuits, local overheating (hot spots) can be detected by monitoring the temperature gradients present in the silicon substrate at a given depth, laterally accessing the die with an infra-red laser beam probe. The sensed magnitude is the laser beam deflection, which is proportional to the temperature gradients found along the beam trajectory (mirage effect). Biasing the devices with periodic electrical functions allows employing lock-in detection strategies (noise immunity) and thermally isolating the analysed chip substrate thermal behaviour from the external boundary conditions by setting the excitation frequency (control of the thermal energy penetration depth). Measuring the first harmonic of the deflection signal components (vertical and horizontal) allows performing a fast and accurate location of devices, interconnects or circuits dissipating relatively high power levels without any calibration procedure. It has been concluded that the horizontal component of the beam deflection provides a higher spatial resolution than the vertical one when measurements are performed beyond the thermal energy penetration depth. | Descripción: | 4 páginas, 2 figuras. | Versión del editor: | http://dx.doi.org/10.1088/0022-3727/42/1/012002 | URI: | http://hdl.handle.net/10261/42206 | DOI: | 10.1088/0022-3727/42/1/012002 | ISSN: | 0022-3727 | E-ISSN: | 1361-6463 |
Aparece en las colecciones: | (IMB-CNM) Artículos (ICMAB) Artículos |
Mostrar el registro completo
CORE Recommender
SCOPUSTM
Citations
4
checked on 24-abr-2024
WEB OF SCIENCETM
Citations
2
checked on 26-feb-2024
Page view(s)
391
checked on 23-abr-2024
Google ScholarTM
Check
Altmetric
Altmetric
NOTA: Los ítems de Digital.CSIC están protegidos por copyright, con todos los derechos reservados, a menos que se indique lo contrario.