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Cold plasma chemistry and diagnostics

AuthorsTanarro, Isabel ; Herrero, Víctor J. ; Carrasco, Esther ; Jiménez-Redondo, Miguel
KeywordsCold plasma
Glow discharge
Plasma chemistry
Plasma kinetics
Plasma diagnostics
Plasma-surface interaction
Issue Date10-Jun-2011
CitationVacuum 85: 1120-1124 (2011).
AbstractThis paper gives an overview of the main chemical processes which take place in cold plasmas generated in glow discharges, both in the gas phase and at the surfaces in contact with the plasma. Illustrative examples are provided where the relevance of different processes is evinced. Most common plasma characterization techniques and their recent improvements are also presented briefly.
Description5 páginas, 3 figuras.- El pdf esta en formato pre-print.
Publisher version (URL)http://dx.doi.org/10.1016/j.vacuum.2010.12.027
Appears in Collections:(CFMAC-IEM) Artículos
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