Por favor, use este identificador para citar o enlazar a este item:
http://hdl.handle.net/10261/39211
COMPARTIR / EXPORTAR:
SHARE CORE BASE | |
Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL | DATACITE | |
Título: | A view of the implanted SiC damage by Rutherford backscattering spectroscopy, spectroscopic ellipsometry, and transmission electron microscopy |
Autor: | Battistig, Gabor; García López, J. CSIC ORCID; Morilla, Yolanda CSIC ORCID | Palabras clave: | SiC Crystal structures Transmission electron microscopy (TEM) Rutherford backscattering spectrometry in channeling geometry (RBS/C) Spectroscopic ellipsometry (SE) High resolution electron microscopy (HREM) |
Fecha de publicación: | 3-nov-2006 | Editor: | American Institute of Physics | Citación: | Journal of Applied Physics 100(9): 093507 (2006) | Resumen: | 4H-SiC single crystalline substrates were implanted at room temperature with 150 keV Al+ ions using fluences of 4×1014, 1×1015, and 2×1015 cm−2 with current density of 2.5 μA cm−2. The samples were subsequently annealed at 1100 °C in N2 for 1 h in order to analyze their structural recovery. The disorder induced in both sublattices by the Al+ ions was studied by backscattering spectrometry in channeling geometry with a 3.5 MeV He2+ beam. The results were compared with the optical properties of the samples measured by spectroscopic ellipsometry. In a previous work, we concluded that during the postimplantation annealing of a highly damaged SiC crystalline material the short distance order can be recovered, while the long distance disorder remains. We also presented the possibility to have grains of different polytypes oriented faraway from the original direction. Now, this alternative is confirmed by the cross-sectional transmission and high resolution electron microscopy studies, carried out to obtain information about the crystal structure. | Descripción: | 5 páginas, 5 figuras, 1 tabla.-- et al. | Versión del editor: | http://dx.doi.org/10.1063/1.2360150 | URI: | http://hdl.handle.net/10261/39211 | DOI: | 10.1063/1.2360150 | ISSN: | 0021-8979 | E-ISSN: | 1089-7550 |
Aparece en las colecciones: | (CNA) Artículos |
Ficheros en este ítem:
Fichero | Descripción | Tamaño | Formato | |
---|---|---|---|---|
A_view_2006.pdf | 439,75 kB | Adobe PDF | Visualizar/Abrir |
CORE Recommender
SCOPUSTM
Citations
10
checked on 06-abr-2024
WEB OF SCIENCETM
Citations
10
checked on 19-feb-2024
Page view(s)
349
checked on 18-abr-2024
Download(s)
241
checked on 18-abr-2024
Google ScholarTM
Check
Altmetric
Altmetric
NOTA: Los ítems de Digital.CSIC están protegidos por copyright, con todos los derechos reservados, a menos que se indique lo contrario.