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Title

Simultaneous imaging of the topography and dynamic properties of nanomechanical systems by optical beam deflection microscopy

AuthorsKosaka, Priscila M. ; Tamayo de Miguel, Francisco Javier ; Gil-Santos, Eduardo ; Mertens, Johann ; Pini, Valerio ; Martínez Cuadrado, Nicolás Francisco
KeywordsCantilevers
Image resolution
Internal stresses
Laser beams
Micromechanical devices
Optical images
Issue Date24-Mar-2011
PublisherAmerican Institute of Physics
CitationJournal of Applied Physics 109(6): 064315 (2011)
AbstractWe present an optical microscopy technique based on the scanning of a laser beam across the surface of a sample and the measurement of the deflection of the reflected laser beam in two dimensions. The technique is intended for characterization of nanomechanical systems. It provides the height of a nanomechanical system with sub-nanometer vertical resolution. In addition, it simultaneously provides a complete map of the resonant properties. We demonstrate the capability of the technique by analyzing the residual stress and vibration mode shape of a system consisting of two elastically coupled nanocantilevers. The technique is simple, allows imaging in air, vacuum and liquids, and it is unique in providing synchronized information of the static and dynamic out-of-plane displacement of nanomechanical systems.
Description5 figuras, 5 páginas
Publisher version (URL)http://dx.doi.org/10.1063/1.3561812
URIhttp://hdl.handle.net/10261/39099
DOI10.1063/1.3561812
ISSN0021-8979
Appears in Collections:(IMN-CNM) Artículos
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