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Título : Giant growth rate in nano-oxidation of p-silicon surfaces by using ethyl alcohol liquid bridges
Autor : Tello Ruiz, Marta ; García García, Ricardo
Palabras clave : Oxidation
Organic Compounds
Nanolithography
Atomic Force Microscopy
Water
Silicon
Elemental Semiconductors
Fecha de publicación : 22-sep-2003
Editor: American Institute of Physics
Citación : Applied Physics Letters 83, 12: 2339-2341 (2003)
Resumen: We demonstrate that local oxidation nanolithography can be performed in liquid environments different from aqueous solutions with a significant improvement in the aspect ratio of the fabricated motives. Here, we perform a comparative study of noncontact atomic force microscopy oxidation experiments in water and ethyl alcohol. The growth rate of local oxides can be increased by almost an order of magnitude by using oxyanions from ethyl alcohol molecules. We propose that the enhanced growth rate is a consequence of the reduction of the trapped charges within the growing oxide. The present results open the possibility of using local oxidation nanolithography to directly fabricate vertical oxide structures while keeping lateral sizes in the nanometer range.
URI : http://hdl.handle.net/10261/2815
DOI: 10.1063/1.1613799
ISSN: 0003-6951
Aparece en las colecciones: (IMM-CNM) Artículos
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