Please use this identifier to cite or link to this item: http://hdl.handle.net/10261/28133
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dc.contributor.authorLechuga, Laura M.-
dc.contributor.authorZinoviev, Kirill-
dc.contributor.authorDomínguez, Carlos-
dc.contributor.authorPlaza, José Antonio-
dc.contributor.authorCadarso Busto, Víctor Javier-
dc.date.accessioned2010-10-01T11:59:08Z-
dc.date.available2010-10-01T11:59:08Z-
dc.date.issued2006-12-27-
dc.identifier.citationEP 1 736 804 A1en_US
dc.identifier.urihttp://hdl.handle.net/10261/28133-
dc.descriptionTitular: Consejo Superior de Investigaciones Científicas (CSIC).-- Fecha solicitud: 24-Junio-2005.-- 22 páginas, 7 figuras.en_US
dc.description.abstractThe detector comprises: at least one cantilever (5) extending from a first part (2) towards a second part (3) across a gap (4), said cantilever (5) constituting a first optical waveguide; and at least one second optical waveguide (6), positioned on said second part (3) and separated from the cantilever by a second gap (ΔX). The first part (2) comprises a first layer structure (21) and the second part (3) comprising a second layer structure (31, 32). The first layer structure and the second layer structure are selected so that in a neutral reference position, the cantilever (5) and the second optical waveguide (6) are misaligned.en_US
dc.format.extent592857 bytes-
dc.format.mimetypeapplication/pdf-
dc.language.isoengen_US
dc.rightsopenAccessen_US
dc.titleCantilever- based detector device and method of manufacturing such a deviceen_US
dc.typepatenteen_US
dc.description.peerreviewedPeer revieweden_US
item.fulltextWith Fulltext-
item.openairetypepatente-
item.languageiso639-1en-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.cerifentitytypePublications-
item.grantfulltextopen-
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