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Cantilever- based detector device and method of manufacturing such a device

AuthorsLechuga, Laura M. CSIC ORCID ; Zinoviev, Kirill; Domínguez, Carlos; Plaza, José Antonio CSIC ORCID ; Cadarso Busto, Víctor Javier
Issue Date27-Dec-2006
CitationEP 1 736 804 A1
AbstractThe detector comprises: at least one cantilever (5) extending from a first part (2) towards a second part (3) across a gap (4), said cantilever (5) constituting a first optical waveguide; and at least one second optical waveguide (6), positioned on said second part (3) and separated from the cantilever by a second gap (ΔX). The first part (2) comprises a first layer structure (21) and the second part (3) comprising a second layer structure (31, 32). The first layer structure and the second layer structure are selected so that in a neutral reference position, the cantilever (5) and the second optical waveguide (6) are misaligned.
DescriptionTitular: Consejo Superior de Investigaciones Científicas (CSIC).-- Fecha solicitud: 24-Junio-2005.-- 22 páginas, 7 figuras.
Appears in Collections:(IMN-CNM) Patentes

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