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Título

Integrated micro- and nano-optical biosensor silicon devices CMOS compatible

AutorLechuga, Laura M. ; Sepúlveda, Borja ; Sánchez del Río, José ; Blanco, Francisco J. ; Calle Martín, Ana ; Domínguez, Carlos
Palabras claveOptical biosensor
Mach-Zehnder interferometer
Integrated optics
BIOMEMS
Optical waveguides
Immobilization at nanometer scale
Fecha de publicación15-jul-2004
EditorSociety of Photo-Optical Instrumentation Engineers
CitaciónProceedings of SPIE 5357: 96-110 (2004)
ResumenWe show the design, fabrication and testing of micro/nanobiosensor devices based on optical waveguides in a highly sensitive interferometric configuration and by using evanescent wave detection. The devices are fabricated by standard Silicon CMOS microelectronics technology after a precise design for achieving a high sensitivity for biosensing applications. Two integrated Mach-Zehnder interferometric (MZI) devices, using two technologies, have been developed: (a) a MZI Microdevice based on ARROW waveguide (b) a MZI Nanodevice based on TIR waveguide. Direct biosensing with both sensors has been tested, after a specific receptor coupling to the surface device using nanometer scale immobilization techniques. Further integration of the microoptical sensors, the microfluidics, the photodetectors and the CMOS electronics will render in a lab-on-a-chip microsystem.
Descripción15 páginas, 18 figuras.-- Trabajo presentado en la conferencia "Optoelectronic Integration on Silicon"; San Jose, CA (USA); 15-Julio-2004; Editores: David J. Robbins, Ghassan E. Jabbour .
Versión del editorhttp://dx.doi.org/10.1117/12.521104
URIhttp://hdl.handle.net/10261/27901
DOI10.1117/12.521104
ISSN0277-786X
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