English   español  
Por favor, use este identificador para citar o enlazar a este item: http://hdl.handle.net/10261/2668
Título

Spectroscopic measurements of the electron temperature in low pressure radiofrequency Ar/H2/C2H2 and Ar/H2/CH4 plasmas used for the synthesis of nanocarbon structures

AutorGordillo Vázquez, Francisco J. ; Camero, Manuel; Gómez-Aleixandre, C.
Fecha de publicación2-dic-2005
EditorInstitute of Physics Publishing
CitaciónPlasma Sources Science & Technology, 15 (2006): 42-51.
ResumenThis paper deals with optical emission spectroscopy studies of low pressure (0.1–0.5 Torr) capacitively coupled radiofrequency hydrocarbon/argon-rich plasmas used for the synthesis of nanocarbon structures. The main goal of this paper is to obtain the electron temperature of such far-from-equilibrium plasmas as a function of the pressure, the excitation power and the argon content. In doing so, we have found that the argon upper energy levels used for electron temperature estimation remain close to corona balance. The latter has allowed us to use a modified Boltzmann plot technique to derive the electron temperature. It was found that, for the plasmas investigated, an increase of the argon population density (from 10% to 95%) leads to a pronounced decrease of the electron temperature while an increase of the processing pressure produces a moderate increase of the electron temperature. Additionally, the increase of the power from 50 to 300W produces a very slight growth of the electron temperature.
Descripción[Full text not available yet]
URIhttp://hdl.handle.net/10261/2668
DOI10.1088/0963-0252/15/1/007
ISSN0963-0252
Aparece en las colecciones: (CFMAC-IO) Artículos
(ICMM) Artículos
Ficheros en este ítem:
No hay ficheros asociados a este ítem.
Mostrar el registro completo
 

Artículos relacionados:


NOTA: Los ítems de Digital.CSIC están protegidos por copyright, con todos los derechos reservados, a menos que se indique lo contrario.