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Título : Low Pressure PECVD of Nanoparticles in carbon thin films from low pressure radiofrequency Ar/H2/C2H2 plasmas. Synthesis of films and analysis of the electron energy distribution function
Autor : Camero, Manuel; Gordillo Vázquez, Francisco J. ; Gómez-Aleixandre, C.
Palabras clave : Carbon nanoparticles
C2H2
OES
Plasma EEDF
RF-CVD
Fecha de publicación : 2007
Editor: John Wiley & Sons
Citación : Chemical Vapor Deposition, 13 (2007): 326-334.
Resumen: A study of the synthesis of carbon nanoparticles embedded in carbon thin films deposited by radiofrequency (RF) (13.56 MHz) Ar/H2 (4 %)/C2H2 plasmas is presented. The carbon nanospheres exhibit an amorphous structure that is clearly observed at 300 W, under 0.1 Torr, and grows in size with increasing C2H2 between 1% and 20 %. Above a C2H2 concentration threshold (20% in this case) carbon nanoparticles are no longer formed. In order to study possible changes in the plasma kinetics, optical emission spectroscopy (OES) is used to evaluate the electron temperature while changing the C2H2 concentration. In addition, an analysis of the temporal evolution of the electron energy distribution function (EEDF) is carried out for various C2H2 concentrations considering the effects produced by electron-vibrational superelastic collisions and relative concentration of excited Ar atoms. Finally, the morphological and tribological features of the deposited films are characterized.
Descripción : [Full-text paper not available yet]
URI : http://hdl.handle.net/10261/2662
DOI: 10.1002/cvde.200606554
ISSN: 0948-1907
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