English   español  
Por favor, use este identificador para citar o enlazar a este item: http://hdl.handle.net/10261/2662
Compartir / Impacto:
Estadísticas
logo share SHARE logo core CORE   Add this article to your Mendeley library MendeleyBASE

Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL
Exportar a otros formatos:

Título

Low Pressure PECVD of Nanoparticles in carbon thin films from low pressure radiofrequency Ar/H2/C2H2 plasmas. Synthesis of films and analysis of the electron energy distribution function

AutorCamero, Manuel; Gordillo Vázquez, Francisco J. ; Gómez-Aleixandre, C.
Palabras claveCarbon nanoparticles
C2H2
OES
Plasma EEDF
RF-CVD
Fecha de publicación2007
EditorJohn Wiley & Sons
CitaciónChemical Vapor Deposition, 13 (2007): 326-334.
ResumenA study of the synthesis of carbon nanoparticles embedded in carbon thin films deposited by radiofrequency (RF) (13.56 MHz) Ar/H2 (4 %)/C2H2 plasmas is presented. The carbon nanospheres exhibit an amorphous structure that is clearly observed at 300 W, under 0.1 Torr, and grows in size with increasing C2H2 between 1% and 20 %. Above a C2H2 concentration threshold (20% in this case) carbon nanoparticles are no longer formed. In order to study possible changes in the plasma kinetics, optical emission spectroscopy (OES) is used to evaluate the electron temperature while changing the C2H2 concentration. In addition, an analysis of the temporal evolution of the electron energy distribution function (EEDF) is carried out for various C2H2 concentrations considering the effects produced by electron-vibrational superelastic collisions and relative concentration of excited Ar atoms. Finally, the morphological and tribological features of the deposited films are characterized.
Descripción[Full-text paper not available yet]
URIhttp://hdl.handle.net/10261/2662
DOI10.1002/cvde.200606554
ISSN0948-1907
Aparece en las colecciones: (ICMM) Artículos
(CFMAC-IO) Artículos
Ficheros en este ítem:
No hay ficheros asociados a este ítem.
Mostrar el registro completo
 

Artículos relacionados:


NOTA: Los ítems de Digital.CSIC están protegidos por copyright, con todos los derechos reservados, a menos que se indique lo contrario.