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Large effects of small pressure changes in the kinetics of low pressure glow discharges

AuthorsTanarro, Isabel CSIC ORCID ; Herrero, Víctor J. CSIC ORCID
Issue Date13-Jul-2010
PublisherCSIC - Instituto de Estructura de la Materia (IEM)
AbstractLow pressure glow discharges produce cold plasmas, far from thermal equilibrium. Typical electronic temperatures in this kind of plasmas range between 1 and 10 eV, whereas those of the heavier species (neutrals and ions) remain close to room temperature (< 0.1 eV). Cold plasmas are useful for a large number of scientific studies, like spectroscopy of excited levels or kinetics of highly reactive species (radicals and ions), which play a key role in the gas phase chemistry of combustion or in remote regions of interstellar space and planetary ionospheres. Cold plasmas find also widespread application in elemental analysis and in a variety of technological processes, like sputtering, thin film processing, plasma sterilization, and controlled fusion devices, where they are used for wall conditioning and cleaning
Appears in Collections:(CFMAC-IEM) Comunicaciones congresos

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