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Título

From carbon nanostructures to new photoluminescence sources: an overview of new perspectives and emerging applications of low pressure PECVD

AutorGordillo Vázquez, Francisco J. ; Herrero, Víctor J. ; Tanarro, Isabel
Palabras claveBiomedical applications
Nanoparticles, inorganic
Novel diagnostics
Plasma-enhanced CVD (PECVD), low pressure
Plasma
Silica
Fecha de publicación2007
EditorJohn Wiley & Sons
CitaciónChemical Vapor Deposition 13(6-7): 267-279 (2007)
ResumenLow-pressure, plasma-enhanced (PE)CVD is a powerful and versatile technique that has been used for thin-film deposition and surface treatment since the early 1960s. However, it is only recently that it has been used in applications other than the different stages of microelectronic circuit fabrication. Now, PECVD is being used in emerging applications due to new materials and process requirements in a wide variety of areas, such as biomedical applications, solar cells, fuel cell development, fusion research, or the synthesis of silicon nanocrystals showing efficient photoluminescence, useful for future solid-state light sources. These new scenarios have stimulated further development of novel PECVD diagnostic techniques, together with fundamental experimental and theoretical studies aimed at a better understanding of some of the basic processes underlying the plasma/surface interaction. This paper gives an overview of some new research areas where PECVD is finding promising applications.
Descripción13 pages, 9 figures.
Versión del editorhttp://dx.doi.org/10.1002/cvde.200604034
URIhttp://hdl.handle.net/10261/2661
DOI10.1002/cvde.200604034
ISSN0948-1907
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