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Título : From carbon nanostructures to new photoluminescence sources: an overview of new perspectives and emerging applications of low pressure PECVD
Autor : Gordillo Vázquez, Francisco J. ; Herrero, Víctor J. ; Tanarro, Isabel
Palabras clave : Biomedical applications
Nanoparticles, inorganic
Novel diagnostics
Plasma-enhanced CVD (PECVD), low pressure
Plasma
Silica
Fecha de publicación : 2007
Editor: John Wiley & Sons
Citación : Chemical Vapor Deposition 13(6-7): 267-279 (2007)
Resumen: Low-pressure, plasma-enhanced (PE)CVD is a powerful and versatile technique that has been used for thin-film deposition and surface treatment since the early 1960s. However, it is only recently that it has been used in applications other than the different stages of microelectronic circuit fabrication. Now, PECVD is being used in emerging applications due to new materials and process requirements in a wide variety of areas, such as biomedical applications, solar cells, fuel cell development, fusion research, or the synthesis of silicon nanocrystals showing efficient photoluminescence, useful for future solid-state light sources. These new scenarios have stimulated further development of novel PECVD diagnostic techniques, together with fundamental experimental and theoretical studies aimed at a better understanding of some of the basic processes underlying the plasma/surface interaction. This paper gives an overview of some new research areas where PECVD is finding promising applications.
Descripción : 13 pages, 9 figures.
Versión del editor: http://dx.doi.org/10.1002/cvde.200604034
URI : http://hdl.handle.net/10261/2661
DOI: 10.1002/cvde.200604034
ISSN: 0948-1907
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