Please use this identifier to cite or link to this item:
http://hdl.handle.net/10261/258075Share/Export:
 SHARE
BASE
|
|
| Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL | DATACITE | |
| Title: | A study of the undercutting characteristics in the TMAH:IPA system |
Authors: | Merlos Domingo, Ángel CSIC ORCID ; Acero Leal, María Cruz ; Bao, Min-Hang; Bausells, Joan CSIC ORCID ; Esteve i Tintó, Jaume | Issue Date: | 1-Jun-1992 | Publisher: | IOP Publishing | Citation: | Journal of Micromechanics and Microengineering 2(3): 181-183 (1992) | Abstract: | A new etching system of tetramethyl ammonium hydroxide-2-propanol (TMAH-IPA) is suggested. The undercutting ratio for TMAH at 80 degrees C is about 7, much higher than for KOH etchants. The addition of IPA in the TMAH system maintains the main features of TMAH and reduces the undercutting ratio by a factor of 2-3. | Description: | Trabajo presentado en el Micromechanics Europe 1992 (MME'92), celebrado en Lovaina (Bélgica), los días 1 y 2 de junio de 1992 | Publisher version (URL): | http://dx.doi.org/10.1088/0960-1317/2/3/014 | URI: | http://hdl.handle.net/10261/258075 | Identifiers: | doi: 10.1088/0960-1317/2/3/014 issn: 0960-1317 e-issn: 1361-6439 |
| Appears in Collections: | (IMB-CNM) Comunicaciones congresos |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| accesoRestringido.pdf | 15,38 kB | Adobe PDF |  View/Open |
Review this work
Page view(s)
13
checked on Jun 25, 2022
Download(s)
4
checked on Jun 25, 2022
Google ScholarTM
Check
WARNING: Items in Digital.CSIC are protected by copyright, with all rights reserved, unless otherwise indicated.