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Ion sensor based on differential measurement, and production method

Other TitlesAuf differentieller messung basierender ionensensor uno herstellungsverfahren
Capteur d'ions fonde sur une mesure differentielle et procede de fabrication
AuthorsBaldi Coll, Antonio; Domínguez, Carlos; Jiménez-Jorquera, Cecilia CSIC ORCID CVN ; Fernández Sánchez, César CSIC ORCID ; Llobera, Andreu; Merlos Domingo, Ángel CSIC ORCID ; Cadarso Busto, Víctor Javier; Burdallo, Isabel; Vera Gras, Ferran
Issue Date10-Jun-2021
CitationEP3106865 B1
AbstractThe invention relates to an ion sensor based on differential measurement, comprising an ISFET/REFET pair, wherein the REFET is defined by a structure formed by an ISFET covered by a micro-reservoir containing an internal reference solution. The sensor comprises: a first and a second ion-selective field effect transistor; an electrode; a substrate on the surface of which the two transistors, connection tracks and the electrode are integrated; and a structure adhered to the first ion-selective field effect transistor, creating a micro-reservoir on the gate of said first transistor, said micro-reservoir having a micro-channel connecting the micro-reservoir with the exterior, and said micro-reservoir being filled with the reference solution
Appears in Collections:(IMB-CNM) Patentes

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