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Title: | Silicon microcantilevers with MOSFET detection |
Authors: | Tosolini, Giordano; Villanueva, G.; Perez Murano, Francesc X. CSIC ORCID ; Bausells, Joan CSIC ORCID | Keywords: | Microcantilever MOSFET Piezoresistance Biosensor |
Issue Date: | 26-Nov-2009 | Publisher: | Elsevier | Citation: | Microelectronic Engineering 87 (2010) 1245–1247 | Abstract: | We report the fabrication of silicon microcantilevers with MOSFET detection, to be used in force measurements for biomolecular detection. Thin cantilevers are required for a high force sensitivity. Therefore the source and drain of the transistors have been fabricated by As implantation to obtain shallow PN junctions. The cantilevers have been oriented on the non-standard (100) crystallographic direction of silicon, to maximize the stress response of the NMOS transistors. The force sensitivity and resolution of the cantilevers have been tested by applying a force with an AFM tip. Values of 25 μV/pN and 56 pN respectively have been obtained for a force applied at the tip of a cantilever with a length of 200 μm, a width of 24 μm and a silicon thickness of 340 nm. | Publisher version (URL): | http://dx.doi.org/10.1016/j.mee.2009.11.125 | URI: | http://hdl.handle.net/10261/23660 | DOI: | 10.1016/j.mee.2009.11.125 | ISSN: | 0167-9317 |
Appears in Collections: | (IMB-CNM) Artículos |
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