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Title

Silicon microcantilevers with MOSFET detection

AuthorsTosolini, Giordano; Villanueva, G.; Perez Murano, Francesc X. CSIC ORCID ; Bausells, Joan CSIC ORCID
KeywordsMicrocantilever
MOSFET
Piezoresistance
Biosensor
Issue Date26-Nov-2009
PublisherElsevier
CitationMicroelectronic Engineering 87 (2010) 1245–1247
AbstractWe report the fabrication of silicon microcantilevers with MOSFET detection, to be used in force measurements for biomolecular detection. Thin cantilevers are required for a high force sensitivity. Therefore the source and drain of the transistors have been fabricated by As implantation to obtain shallow PN junctions. The cantilevers have been oriented on the non-standard (100) crystallographic direction of silicon, to maximize the stress response of the NMOS transistors. The force sensitivity and resolution of the cantilevers have been tested by applying a force with an AFM tip. Values of 25 μV/pN and 56 pN respectively have been obtained for a force applied at the tip of a cantilever with a length of 200 μm, a width of 24 μm and a silicon thickness of 340 nm.
Publisher version (URL)http://dx.doi.org/10.1016/j.mee.2009.11.125
URIhttp://hdl.handle.net/10261/23660
DOI10.1016/j.mee.2009.11.125
ISSN0167-9317
Appears in Collections:(IMB-CNM) Artículos

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