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Título

Silicon microcantilevers with MOSFET detection

AutorTosolini, Giordano; Villanueva, G.; Pérez Murano, Francesc; Bausells, Joan
Palabras claveMicrocantilever
MOSFET
Piezoresistance
Biosensor
Fecha de publicación26-nov-2009
EditorElsevier
CitaciónMicroelectronic Engineering 87 (2010) 1245–1247
ResumenWe report the fabrication of silicon microcantilevers with MOSFET detection, to be used in force measurements for biomolecular detection. Thin cantilevers are required for a high force sensitivity. Therefore the source and drain of the transistors have been fabricated by As implantation to obtain shallow PN junctions. The cantilevers have been oriented on the non-standard (100) crystallographic direction of silicon, to maximize the stress response of the NMOS transistors. The force sensitivity and resolution of the cantilevers have been tested by applying a force with an AFM tip. Values of 25 μV/pN and 56 pN respectively have been obtained for a force applied at the tip of a cantilever with a length of 200 μm, a width of 24 μm and a silicon thickness of 340 nm.
Versión del editorhttp://dx.doi.org/10.1016/j.mee.2009.11.125
URIhttp://hdl.handle.net/10261/23660
DOI10.1016/j.mee.2009.11.125
ISSN0167-9317
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