English   español  
Please use this identifier to cite or link to this item: http://hdl.handle.net/10261/226701
logo share SHARE logo core CORE   Add this article to your Mendeley library MendeleyBASE

Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL | DATACITE
Exportar a otros formatos:


High-frequency mechanical excitation of a silicon nanostring with piezoelectric aluminum nitride layers

AuthorsPitanti, A.; Makkonen, Tapani; Colombano, Martin F. CSIC ORCID; Zanotto, Simone; Vicarelli, Leonardo; Cecchi, Marco; Griol, Amadeu; Navarro-Urrios, D. CSIC ORCID CVN; Sotomayor Torres, C. M. CSIC ORCID; Martínez, Alejandro; Ahopelto, J.
Issue Date2020
PublisherAmerican Physical Society
CitationPhysical Review Applied 14(1): 014054 (2020)
AbstractA strong trend for quantum-based technologies and applications follows the avenue of combining different platforms to exploit their complementary technological and functional advantages. Micro and nanomechanical devices are particularly suitable for hybrid integration due to the ease of fabrication at multiscales and their pervasive coupling with electrons and photons. Here, we report on a nanomechanical technological platform where a silicon chip is combined with an aluminum nitride layer. Exploiting the AlN piezoelectricity, surface acoustic waves (SAWs) are injected in the Si layer where the material has been locally patterned and etched to form a suspended nanostring. Characterizing the nanostring vertical displacement induced by the SAW, we find an external excitation peak efficiency in excess of 500 pm/V at 1-GHz mechanical frequency. Exploiting the long-term expertise in silicon photonic and electronic devices as well as the SAW robustness and versatility, our technological platform represents a candidate for hybrid quantum systems.
Publisher version (URL)https://doi.org/10.1103/PhysRevApplied.14.014054
Appears in Collections:(CIN2) Artículos
Files in This Item:
File Description SizeFormat 
highlayer.pdf1,83 MBAdobe PDFThumbnail
Show full item record
Review this work

Related articles:

WARNING: Items in Digital.CSIC are protected by copyright, with all rights reserved, unless otherwise indicated.