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Control of lateral composition distribution in graded films of soluble solid systems A1−xBx by partitioned dual-beam pulsed laser deposition

AuthorsSakai, Joe; Caicedo, José Manuel ; Vales-Castro, Pablo; Padilla-Pantoja, Jessica; Sauthier, Guillaume ; Catalán, Gustau ; Santiso, José
KeywordsPulsed laser deposition
Compositionally-graded film
Morphotropic phase boundary
Monte Carlo method
Piezoelectric material
Perovskite type manganite
Issue Date2020
PublisherMultidisciplinary Digital Publishing Institute
CitationCoatings 10(6): 540 (2020)
AbstractLateral compositionally-graded thin films are powerful media for the observation of phase boundaries as well as for high-throughput materials exploration. We herein propose a method to prepare epitaxial lateral compositionally-graded films using a dual-beam pulsed laser deposition (PLD) method with two targets separated by a partition. Tuning the ambient pressure and the partition—substrate gap makes it possible to control of the gradient length of the deposits at the small sizes (≤ 10 mm) suitable for commercial oxide single crystal substrates. A simple Monte Carlo simulation qualitatively reproduced the characteristic features of the lateral thickness distribution. To demonstrate this method, we prepared (1−x)PbTiO3—xPbZrO3 and (1−x)LaMnO3—xLa0.6Sr0.4MnO3 films with lateral composition gradient widths of 10 and 1 mm, respectively, with the partitioned dual PLD.
DescriptionThis article belongs to the Special Issue Advances in Multi-Target Physical Vapor Deposition Techniques.
Publisher version (URL)https://doi.org/10.3390/coatings10060540
Appears in Collections:(CIN2) Artículos
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