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| Título: | Manufacturability and Stress Issues in 3D Silicon Detector Technology at IMB-CNM |
Autor: | Quirion, David; Manna, M.; Hidalgo, Salvador ; Pellegrini, Giulio CSIC ORCID | Palabras clave: | 3D silicon detectors Process integration Process-induced stress Silicon manufacturing Radiation-hard detectors High-energy physic experiments Through-silicon vias |
Fecha de publicación: | 2020 | Editor: | Multidisciplinary Digital Publishing Institute | Citación: | Micromachines 11(12): 1126 (2020) | Resumen: | This paper provides an overview of 3D detectors fabrication technology developed in the clean room of the Microelectronics Institute of Barcelona (IMB-CNM). Emphasis is put on manufacturability, especially on stress and bow issues. Some of the technological solutions proposed at IMB-CNM to improve manufacturability are presented. Results and solutions from other research institutes are also mentioned. Analogy with through-silicon-via technology is drawn. This article aims at giving hints of the technology improvements implemented to upgrade from a R&D process to a mature technology. | Versión del editor: | https://doi.org/10.3390/mi11121126 | URI: | http://hdl.handle.net/10261/225745 | DOI: | 10.3390/mi11121126 | E-ISSN: | 2072-666X |
| Aparece en las colecciones: | (IMB-CNM) Artículos |
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|---|---|---|---|---|
| Manufacturability_Quirion_Art2020.pdf | 10,91 MB | Adobe PDF |  Visualizar/Abrir |
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