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Título

High mobility and high thermoelectric power factor in epitaxial ScN thin films deposited with plasma-assisted molecular beam epitaxy

AutorRao, Dheemahi; Biswas, Bidesh; Flores, Eduardo CSIC ORCID; Chatterjee, Abhijit; Garbrecht, Magnus; Koh, Yee Rui; Bhatia, Vijay; Pillai, Ashalatha Indiradevi Kamalasanan; Hopkins, Patrick E.; Martín-González, Marisol CSIC ORCID ; Saha, Bivas
Fecha de publicación14-abr-2020
EditorAmerican Institute of Physics
CitaciónApplied Physics Letters 116: 152103 (2020)
ResumenScandium nitride (ScN) is an emerging rock salt III-nitride semiconductor and has attracted significant interest in recent years for its potential thermoelectric applications as a substrate for high-quality epitaxial GaN growth and as a semiconducting component for epitaxial single-crystalline metal/semiconductor superlattices for thermionic energy conversion. Solid-solution alloys of ScN with traditional III-nitrides such as AlScN have demonstrated piezoelectric and ferroelectric properties and are actively researched for device applications. While most of these exciting developments in ScN research have employed films deposited using low-vacuum methods such as magnetron sputtering and physical and chemical vapor depositions for thermoelectric applications and Schottky barrier-based thermionic energy conversion, it is necessary and important to avoid impurities, tune the carrier concentrations, and achieve high-mobility in epitaxial films. Here, we report the high-mobility and high-thermoelectric power factor in epitaxial ScN thin films deposited on MgO substrates by plasma-assisted molecular beam epitaxy. Microstructural characterization shows epitaxial 002 oriented ScN film growth on MgO (001) substrates. Electrical measurements demonstrated a high room-temperature mobility of 127 cm/V s and temperature-dependent mobility in the temperature range of 50-400 K that is dominated by dislocation and grain boundary scattering. High mobility in ScN films leads to large Seebeck coefficients (-175 μV/K at 950 K) and, along with a moderately high electrical conductivity, a large thermoelectric power factor (2.3 × 10 W/m-K at 500 K) was achieved, which makes ScN a promising candidate for thermoelectric applications. The thermal conductivity of the films, however, was found to be a bit large, which resulted in a maximum figure-of-merit of 0.17 at 500 K.
Versión del editorhttp://dx.doi.org/10.1063/5.0004761
URIhttp://hdl.handle.net/10261/225028
DOI10.1063/5.0004761
Identificadoresdoi: 10.1063/5.0004761
issn: 0003-6951
e-issn: 1077-3118
Aparece en las colecciones: (IMN-CNM) Artículos




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